Developments in surface contamination and cleaning cleaning techniques

As device sizes in the semiconductor industries shrink, devices become more vulnerable to smaller contaminant particles, and most conventional cleaning techniques employed in the industry are not effective at smaller scales. The book series Developments in Surface Contamination and Cleaning as a who...

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Bibliographic Details

Other Authors:	Kohli, Rajiv (Editor), Mittal, K.L (Editor)
Format:	Electronic Resource
Language:	English
Published:	Oxford William Andrew [2015]
Subjects:	Surfaces (Technology). Surface contamination > Prevention. Particles > Measurement. Cleaning. Coatings. Electronic books.
Online Access:	Available for University of the Philippines System via ScienceDirect. Click here to access Available for University of the Philippines System via ScienceDirect. Click here to access remotely thru EZproxy