Dry etching for microelectronics

Bibliographic Details
Other Authors:	Powell, Ronald A. (Editor)
Format:	Electronic Resource
Language:	English
Published:	Amsterdam Elsevier [1984]
Series:	Materials processing--theory and practices v. 4
Subjects:	Semiconductors > Etching. Plasma etching. Electronic books.
Online Access:	Available for University of the Philippines System via ScienceDirect. Click here to access Also available remotely for University of the Philippines System via ScienceDirect. Click here to access thru EZproxy