Handbook of silicon based MEMS materials and technologies

Bibliographic Details
Other Authors:	Tilli, Markku (Editor)
Format:	Electronic Resource
Language:	English
Published:	London, UK William Andrew/Elsevier 2015.
Edition:	Second edition.
Subjects:	Microelectromechanical systems. Microelectromechanical systems > Materials. Silicon > Electric properties. Electronic books.
Online Access:	Available for University of the Philippines System via ScienceDirect. Click here to access Also available remotely for University of the Philippines System via ScienceDirect. Click here to access thru EZproxy