Novel techniques in semiconductor characterization and failure analysis using optical feedback laser scanning microscopy

Novel techniques in semiconductor characterization and failure analysis using optical feedback laser scanning microscopy

We have developed an inexpensive and compact Optical Feedback Laser Scanning Microscope (OFLSM) that simultaneously obtains confocal reflectance and current images in a semiconductor sample.

Bibliographic Details
Main Author: Cemine, Vernon Julius R. (Author)
Other Authors: Blanca, Carlo Mar Y. (adviser.)
Format: Thesis
Language:English
Published: Quezon City National Institute of Physics, College of Science, University of the Philippines Diliman 2007.
Subjects:
Semiconductors > Characterization.