Microelectronic test structures for CMOS technology

Microelectronic Test Structures for CMOS Technology and Products addresses the basic concepts of the design of test structures for incorporation within test-vehicles, scribe-lines, and CMOS products. The role of test structures in the development and monitoring of CMOS technologies and products has...

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Bibliographic Details

Main Author:	Bhushan, Manjul
Corporate Author:	SpringerLink (Online service)
Other Authors:	Ketchen, Mark B.
Format:	Electronic Resource
Language:	English
Published:	New York Springer c2011.
Subjects:	Metal oxide semiconductors, Complementary > Testing. Electronic books.
Online Access:	Available for University of the Philippines Diliman via SpringerLink. Click here to access