MEMS materials and processes handbook

MEMS materials and processes handbook

Handbook is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on 'Materials' and 'Processes'. The extensive 'Material Sel...

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Bibliographic Details
Corporate Author: SpringerLink (Online service)
Other Authors: Ghodssi, Reza, Lin, Pinyen
Format: Electronic Resource
Language:English
Published: New York, London Springer 2011.
Series:MEMS Reference Shelf 1
Subjects:
Microelectromechanical systems > Materials.
Microelectromechanical systems.
Electronic books.
Online Access:Available for University of the Philippines Diliman via SpringerLink. Click here to access