Micro mechanical systems principles and technology

Bibliographic Details
Other Authors:	Fukuda, T. 1948-, Menz, W.
Format:	Electronic Resource
Language:	English
Published:	Amsterdam Elsevier 1998.
Series:	Handbook of sensors and actuators v. 6.
Subjects:	Microelectromechanical systems > Handbooks, manuals, etc. Electronic books.
Online Access:	Available for University of the Philippines System via ScienceDirect. Click here to access Also available remotely for University of the Philippines System via ScienceDirect. Click here to access thru EZproxy