OSA proceedings on soft x-ray projection lithography, Vol. 18 proceedings of the Topical Meeting, May 10-12, 1993, Monterey, California

OSA proceedings on soft x-ray projection lithography, Vol. 18 proceedings of the Topical Meeting, May 10-12, 1993, Monterey, California

Bibliographic Details
Corporate Author: Optical Society of America
Other Authors: Hawryluck, Andrew M., Stulen, R. H.
Format: Book
Published: Washington, D.C. The Society 1c993.
Series:OSA proceedings v. 18
Subjects:
X-ray lithography > Congresses.