Nano- and micro-electromechanical systems fundamentals of nano- and microengineering

Bibliographic Details
Main Author: Lyshevski, Sergey Edward
Format: Book
Language:English
Published: Boca Raton, Fla. CRC Press c2005.
Edition:2nd ed.
Series:Nano- and microscience, engineering, technology, and medicine series 8
Subjects: