MEMS introduction and fundamentals

Bibliographic Details
Other Authors:	Gad-el-Hak, Mohamed 1945-
Format:	Book
Language:	English
Published:	Boca Raton, Fla. CRC/Taylor & Francis c2006.
Edition:	2nd ed.
Subjects:	Microelectromechanical systems. Microelectronics. Nanotechnology.