Handbook of thin-film deposition processes and techniques principles, methods, equipment, and applications

Handbook of thin-film deposition processes and techniques principles, methods, equipment, and applications

Bibliographic Details
Other Authors: Schuegraf, Klaus, K.
Format: Book
Language:English
Published: Westwood, N.J. Noyes Publications 1988.
Subjects:
Thin film devices > Design and construction > Handbooks, manuals, etc.