Handbook of sputter deposition technology principles, technology, and applications

Handbook of sputter deposition technology principles, technology, and applications

Bibliographic Details
Main Author: Wasa, Kiyotaka
Other Authors: Hayakawa, Shigeru 1925-
Format: Book
Language:English
Published: Park Ridge, N.J. Noyes Publications c1992.
Subjects:
Cathode sputtering (Plating process) > Handbooks, manuals, etc.
Thin films > Handbooks, manuals, etc.