Polymeric materials for microelectronic applications science and technology

Polymeric materials for microelectronic applications science and technology

Bibliographic Details
Corporate Authors: Kobunshi Gakkai (Japan). Polymers for Microelectronics and Photonics Group, American Chemical Society. Division of Polymeric Materials: Science and Engineering
Other Authors: Ito, Hiroshi, Tagawa, Seichi, Horie, Kazuyuki 1941-
Format: Book
Language:English
Published: Washington, DC American Chemical Society 1994.
Series:ACS symposium series 579
Subjects:
Microelectronics > Materials > Congresses.
Polymers > Congresses.