Coagulation-flocculation of combined chemical mechanical polishing wastewater and flouride-containing wastewater from a semiconductor manufacturer
The semiconductor industry is crucial to the technological advancement of modern society. Its rapid growth has brough about increasing demands of ultra pure water especially for chemical mechanical polishing (CMP) and fluoride containing wet-etching unit operations. the study aims to determine the e...
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| Format: | Thesis |
| Language: | English |
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2007.
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