Vapor phase lubrication of microelectromechanical systems (MEMS) for space applications

Vapor phase lubrication of microelectromechanical systems (MEMS) for space applications

Bibliographic Details
Main Author: Laboriante, Ian C. (Author)
Format: Electronic Resource
Language:English
Published: Ann Arbor Michigan ProQuest Information and Learning Company [2007]
Subjects:
Vapor-plating.
Microelectromechanical systems > Lubrication.
Online Access:Full text access requires UP Webmail login