Synthesis of multilayered titanium carbon nitride coatings on stainless steel using a magnetized sheet plasma source

A magnetized sheet plasma source with a magnetron sputtering setup consisting of a pair samarium cobalt (Sm-Co) magnets was utilized for plasma enhanced chemical vapor deposition of multilayered titanium carbon nitride (TiCN) coating on stainless steel substrates. The deposition setup and parameters...

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Bibliographic Details

Main Author:	Rosario, Leo Mendel Dilag (Author)
Other Authors:	Ramos, Henry J. (adviser.)
Format:	Thesis
Language:	English
Subjects:	Stainless steel industry.