Synthesis of multilayered titanium carbon nitride coatings on stainless steel using a magnetized sheet plasma source

A magnetized sheet plasma source with a magnetron sputtering setup consisting of a pair samarium cobalt (Sm-Co) magnets was utilized for plasma enhanced chemical vapor deposition of multilayered titanium carbon nitride (TiCN) coating on stainless steel substrates. The deposition setup and parameters...

Full description

Bibliographic Details
Main Author: Rosario, Leo Mendel Dilag (Author)
Other Authors: Ramos, Henry J. (adviser.)
Format: Thesis
Language:English
Subjects: