Thermo-optic properties of electrochemically etched porous silicon layers

Thermo-optic coefficient of electrochemically etcghed porous silicon (pSi) layers were measured through temperature-dependent spectroscopy. Porous silicon was formed through etiching of p-type (100) silicion wafer in an ethaonic HF solution. Current densities of 2.5mA/cm2, 5mA/cm2, and 15A/cm2 were...

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Bibliographic Details
Main Author: Lopez Jr., Lorenzo P. (Author)
Format: Thesis
Language:English
Published: Quezon City College of Science, University of the Philippines Diliman 2015
Subjects: