Silicide technology for integrated circuits

This book begins with an overview of silicide technology and moves on to provide the fundamentals of silicide formation, including various processing methods. Topics such as the optical emission properties of Fe silicide and their importance for Si-based optoelectronics are discussed, along with Si-...

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Bibliographic Details

Other Authors:	Chen, L. J. (Editor)
Format:	Electronic Resource
Language:	English
Published:	London, United Kingdom Institution of Engineering and Technology 2004.
Subjects:	Silicides. Integrated circuits > Materials. Electronic books.
Online Access:	Available for University of the Philippines Diliman via IET Digital Library. Click here to access Also available remotely for University of the Philippines Diliman via IET Digital Library. Click here to access thru EZproxy