Microsystems dynamics

In recent years microelectromechanical systems (MEMS) have emerged as a new technology with enormous application potential. MEMS manufacturing techniques are essentially the same as those used in the semiconductor industry, therefore they can be produced in large quantities at low cost. The added be...

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Bibliographic Details
Main Author: Ostasevicius, Vytautas
Corporate Author: SpringerLink (Online service)
Other Authors: Dauksevicius, Rolanas
Format: Electronic Resource
Language:English
Published: New York Springer 2011.
Series:Intelligent systems, control, and automation : science an engineering v. 44.
Subjects:
Online Access:Available for University of the Philippines Diliman via SpringerLink. Click here to access