MEMS reliability

Successfully bringing MEMS-based products to market hinges on engineering the component to have sufficient reliability for the intended application, yet the reliability and qualification methodology for MEMS based products is not widely understood. Companies that have a deep understanding of MEMS re...

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Bibliographic Details

Main Author:	Hartzell, Allyson L.
Corporate Author:	SpringerLink (Online service)
Other Authors:	Da Silva, Mark G., Shea, Herbert R., Senturia, Stephen D. 1940-
Format:	Electronic Resource
Language:	English
Published:	New York Springer 2011.
Series:	MEMS reference shelf
Subjects:	Microelectromechanical systems > Reliability. Electronic books.
Online Access:	Available for University of the Philippines Diliman via SpringerLink. Click here to access