Optical emission spectroscopy of low temperature PECVD of diamond and DLC films
"The gas phase chemistry in low temperature (<300°C) diamond and diamond-like carbon (DLC) chemical vapor deposition processes was investigated using optical emission spectroscopy (OES) to determine the effects of the different deposition parameters such as methane concentration, substrate t...
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| Format: | Thesis |
| Language: | English |
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c2004.
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