Microfabrication and nanomanufacturing

Microfabrication and nanomanufacturing

Bibliographic Details
Other Authors: Jackson, Mark J.
Format: Book
Language:English
Published: Boca Raton, Fla. CRC/Taylor & Francis 2006.
Subjects:
Microelectronics.
Integrated circuits > Design and construction.
Nanomanufacturing.
Microelectromechanical systems > Design and construction.