Thermal stability study on titanium disilicide (TiSi2) thin films with titanium nitride (TiN) capping

Thermal stability study on titanium disilicide (TiSi2) thin films with titanium nitride (TiN) capping

Bibliographic Details
Main Author: Venezuela, Jeffrey De Guzman
Format: Thesis
Language:English
Published: 2003.
Subjects:
Titanium compounds > Thermal properties.
Silicon compounds > Thermal properties.
Titanium nitride.
Thin films > Testing.