Growth of amorphous carbon, diamod-like-carbon and diamond films via plasma-enhanced and hot-filament chemical vapor deposition

Growth of amorphous carbon, diamod-like-carbon and diamond films via plasma-enhanced and hot-filament chemical vapor deposition

Bibliographic Details
Main Author: Lubguban, Jorge A.
Format: Thesis
Language:English
Subjects:
Chemical vapor deposition.
Carbon.
Plasma-enhanced chemical deposition.
Semiconductor films.