Silicon nitride (SiNxHy) by plasma-enhanced chemical vapor deposition
| Published in: | Science Diliman Vol. 13, no. 2 (Jul. 2001 - Dec. 2001), 26-28 |
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| Main Author: | |
| Other Authors: | , |
| Format: | Article |
| Language: | English |
| Published: |
2001
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| Subjects: |